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Articles by keyword: «Metallic Impurity»

• About a Novel Gettering Procedure for Multicrystalline Silicon Samples
  Published in: Polycrystalline Semiconductors IV (p485)
• Application of Gate Oxide Integrity to the Evaluation of the Efficiency of Internal and External Gettering Sites in Si Wafers
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p393)
• Evaluation of Ultratrace Metallic Elements in Poly-SiGe Thin Films
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p97)
• Interstitial Defect Reactions in Silicion: The Case of Copper
  Published in: Defect and Diffusion Forum Vols. 131-132 (p89)
• Metallic Impurity Contamination from Tungsten Gate Cleaning
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p23)
• Metallic Impurity Gettering in MeV Implanted Si
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p69)
• Precipitation of Cu, Ni and Fe on Frank-Type Partial Dislocations in Czochralski-Grown Silicon
  Published in: Defects in Semiconductors 18 (p1207)
• The Role of Oxidant in HF-Based Solution for Noble Metal Removal from Substrate
  Published in: Ultra Clean Processing of Silicon Surfaces V (p267)