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Articles by keyword: «Micro-Electromechanical Systems (MEMS)»

• 3C-SiC Films on Si for MEMS Applications: Mechanical Properties
  Published in: Silicon Carbide and Related Materials 2008 (p633)
• A Boost-Up Method of MEMS-Bulk-Micromachining towards C-MEMS Fabrication for Sensing and Manipulating Bioparticles
  Published in: Defects and Diffusion in Ceramics XII (p59)
• A Comb Driving Magnetometer Based on Tunnel Effect
  Published in: Nanoscience and Technology (p561)
• A Finite Element Analysis for Magnetostrictive Thin Film Structures and Its Experimental Verification
  Published in: Fracture and Strength of Solids VI (p1151)
• A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology
  Published in: MEMS/NEMS Nano Technology (p206)
• A High–G Metal Capacitive Microaccelerometer with Round Proof Mass Supported by Multi-Beam
  Published in: Equipment Manufacturing Technology and Automation (p1843)
• A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever
  Published in: MEMS/NEMS Nano Technology (p374)
• A MEMS Safe and Arm Device for Spin Stabilized Ammunition Fuze
  Published in: MEMS, NANO and Smart Systems (p4593)
• A MEMS-Based PDMS Micropump Utilizing Electromagnetic Actuation and Planar In-Contact Check Valves
  Published in: Manufacturing Engineering and Automation I (p1574)
• A Micro Wireless Attitude Determination System Based on the Extended Kalman Filter
  Published in: Mechatronics and Materials Processing I (p2274)
• A More Effective Technique of Design Synthesis for MEMS with Expected Performance
  Published in: Frontiers of Manufacturing and Design Science II (p637)
• A New Industrial Etching & Drying Process for MEMS to Prevent Collapse of Microstructures
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p73)
• A New MEMS Assembly Unit for Hybrid Self Micropositioning and Forced Microclamping of Submilimeter Parts
  Published in: Materials Processing Technologies (p1705)
• A New Method Based on Electropolymerizing Staphylococcal Protein A to Immobilize Antibody in Micro Amperometric Immunosensor
  Published in: Micro and Nano Technology (p320)
• A New Numerical Approach for Adhesive Contacts of Real Engineering Surfaces
  Published in: Frontiers of Manufacturing and Design Science (p1251)