Papers by Keyword: Micro-Force Sensor

Abstract: IPMC (Ion-exchange polymer metal composite) is a kind of novel artificial intelligent materials. It has a lot of good properties, such as light weight, good flexibility, easily cut in any size and shape, and can be used as both an actuator and sensor. A micro-force sensor based on the theory model of cantilever beam structure of IPMC is built up, which is applied to measure probe force during the micro operations under the environment of the cell injection.

Abstract: This article is intended to design a static micro-force sensor with a simple structure employing the polymer material PVDF (polyvinylidene fluoride) film as its sensing element, and will carry out some micro-force tracking tests. During the tracking tests, this paper employs a Fuzzy-PID control method and an ordinary PD control method to control the system, and will also analyze the results of them.

Abstract: A new style micro-force sensor based on a 3-RRR parallel micro-motion stage which had been researching recent years was introduced in this paper. The sensor can be used in micro-force and micro-torque detection in precision engineering. The result and experience from 3-RRR micro-motion stage research bring this new idea. In the first place, the branched chain structure in motion stage needs to be simplified and improved to adapt to the requirement of sensor. Secondly, a mechanics model is constructed according to the sense organ structure. The Jacobin Matrix which is the most important matrix on parallel structure is analyzed and deduced. The relationship among key dimension is worked out through isotropy parameters. With the theory analysis, the final structure of sense organ is determined. The elastomeric sensor body was pasted with electrical-resistance strain gauges, after it was manufactured by Wire-EDM. Strain gauges employed Wheatstone bridge and amplifier AD620 to produce measuring data. Experiment has indicated that the new sensor is competent for micro-force detecting in X, Y direction and micro-moment around Z direction with high stability and reliability.

Abstract: Pb1-xSrx (Zr0.53Ti0.47) O3 (PSZT) thin films have been fabricated on Pt/Ti/SiO2/Si substrate by a sol–gel method combined with a rapid thermal annealing process. The microstructure analysis of the thin films showed that the orientation ratio of (111) was 0.304，0.475 and 0.849 with x=0, 0.03, 0.08. The dielectric measurement suggested that the addition of Sr in Pb(Zr0.53Ti0.47) O3(PZT) thin films greatly improved the dielectric properties of PZT thin films. The dielectric constant for PZT thin films at a frequency of 2 kHz was 648，which was increased to 1239 when 3%at Sr was doped. Meanwhile, the dissipation factor was only increased from 0.02 to 0.03. Three kinds of piezoelectric micro-sensors have been prepared based on PSZT thin films and the sensing sensitivity of 0.017pc/uN, 0.033pc/uN, and 0.011pc/uN were realized as x increased, respectively. It indicated that micro-sensors with PSZT0.03 thin films showed better sensing property than other two.