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Keyword: "Micro-Machined Structures"
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Paper Title Page

Advanced Stress Analysis by Micro-Structures Realization on High Quality Hetero-Epitaxial 3C-SiC for MEMS Application

Authors: Ruggero Anzalone, Massimo Camarda, Giuseppe D'Arrigo, Christopher Locke, Andrea Canino, Nicolò Piluso, Andrea Severino, Antonino La Magna, Stephen E. Saddow, Francesco La Via

133

Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application

Authors: Ruggero Anzalone, Giuseppe D'Arrigo, Massimo Camarda, Nicolò Piluso, Andrea Severino, Francesco La Via

51

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