Keyword: "Microelectromechanical Systems (MEMS)"
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Fabrication of Electrostatically Actuated 4H-SiC Microcantilever Resonators by Using n/p/n Epitaxial Structures and Doping-Selective Electrochemical Etching

Authors: Kosuke Sato, Kohei Adachi, Hajime Okamoto, Hiroshi Yamaguchi, Tsunenobu Kimoto, Jun Suda
Chapter 4: Processing of SiC
Abstract: We fabricated electrostatically actuated single-crystalline 4H-SiC microcantilever resonators. To realize a narrow gap between cantilevers...


New Isolation Optimization Method of RF MEMS Capacitive Switches

Authors: Jun Shou Chen, Zheng You, Yong Ruan, Mu Zhi Hu
Chapter 1: Micro/Nano Transducer/Acutar/Robot
Abstract: A new isolation optimization method of radio frequency (RF) microelectromechanical systems (MEMS) capacitive switches is carried out in this...