Keyword:

Microelectromechanical Systems (MEMS)

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Authors: Kosuke Sato, Kohei Adachi, Hajime Okamoto, Hiroshi Yamaguchi, Tsunenobu Kimoto, Jun Suda
Chapter 4: Processing of SiC
Abstract:We fabricated electrostatically actuated single-crystalline 4H-SiC microcantilever resonators. To realize a narrow gap between cantilevers...
780
Authors: Kosuke Sato, Kohei Adachi, Hajime Okamoto, Hiroshi Yamaguchi, Tsunenobu Kimoto, Jun Suda
Chapter IV: SiC Devices and Circuits
Abstract:We fabricated electrostatically-excited single-crystalline 4H-SiC microcantilever resonators with various thicknesses and lengths. Their...
914
Authors: Jun Shou Chen, Zheng You, Yong Ruan, Mu Zhi Hu
Chapter 1: Micro/Nano Transducer/Acutar/Robot
Abstract:A new isolation optimization method of radio frequency (RF) microelectromechanical systems (MEMS) capacitive switches is carried out in this...
35
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