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Keyword: "Microwave Plasma Chemical Vapor Deposition (microwave PCVD)"
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Paper Title Page

Deep UV Excitation Raman Spectroscopy of Homoepitaxial 4H-SiC Films Grown by Microwave Plasma Chemical Vapor Deposition

Authors: Mitsuo Okamoto, Ryouji Kosugi, Shinichi Nakashima, Kenji Fukuda, Kazuo Arai

629

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