Papers by Keyword: Mini-Environment

Abstract: In this study, a constant temperature environment chamber with high stability is proposed. In the proposed design, the outer temperature is controlled by the air conditioner, the inner temperature is controlled by the electric current generated to control several thermoelectric cooling units. The separation design of the environment chamber from the cooling system can reduce the vibration caused by the thermoelectric cooling elements. This system adopted the Rake’s System Identification Method to obtain the system model, so that optimum PID parameters can be acquired from the simulation of Matlab Simulink. The results show that the vibration can be effectively reduced and the temperature can be controlled within the range of 20±0.007°C in the steady state.

Abstract: This paper develops a new separated mini-environment to provide a constant temperature chamber for the placement of Micro/Nano-metrology instrument. In this paper, the rule of temperature change with time under natural convection and coercive convection is presented. The measurement and control system is composed of TEC, programmable power source and precise temperature measurement system. The mathematic model of the constant temperature chamber is identified making use of system identification theory and system identification toolkit of MATLAB. The temperature stability is improved by applying auto-adaptive PID method. Experiments show that the temperature fluctuation of a single-point is less than 0.02°C and the whole field is within 0.05°C. The goal of high-precision temperature control is achieved.