Authors: Michael Schneider, Laura Stöber, Jens P. Konrath, Florian Patocka, Ulrich Schmid
Abstract: In this paper, the impact of substrate preconditioning by ion bombardment in-situ in a conventional sputter equipment on n-doped 4H-silicon carbide (SiC) Schottky diodes with molybdenum nitride metallization is studied. By variation of the plasma power during argon ion bombardment, the effective barrier height is adjustable in the range from 0.66 to 0.96 eV, as deduced by current / voltage measurements over a wide temperature range. Therefore, this approach offers a straightforward method to tailor the Schottky barrier height over a significant range by introducing an insitu substrate pretreatment step available in most sputter equipment.
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Authors: Olga V. Krysina, Vladimir V. Shugurov, Nikolay Koval, Nikita Prokopenko
Abstract: The paper reports on a study to optimize the modes of plasma-assisted vacuum arc deposition of molybdenum nitride (MoN) coatings. It is shown that the parameters of plasma assistance influence the coating properties and that varying the ion current ratio in the metal-gas plasma makes possible MoN coatings with high hardness and high wear resistance.
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Abstract: Using the specially designed mechanochemical ball-mill equipment, the ultramicro molybdenum nitride powders were prepared from pure molybdenum powders in ammonia atmosphere at room temperature by high-energy ball milling. The results show that the mass ratio of grinding media to powder was 4:1 and after milling for 30 h, the Mo2N of fcc structure was obtained, and the average particle size of powders was around 100 nm. It is found that the chemisorption of ammonia onto the fresh molybdenum surfaces created by milling was the predominant process during solid–gas reaction,and the change of Mo electronic undersaturation induced by the grain refining also accelerated the bonding between Mo and N. The coating was formed on the 40Cr steel base using plasma spray method by mix Ni60 alloy powders and ultramicro Mo2N powders of 5wt%, 10wt% and 15wt%, respectively. Coating abrasion test under the condition of dry-grinding , 2h wear time and 300N test load showed that the wear-resisting property of coating added with ultramicro Mo2N powders could be improved greatly, and the wear-resisting property of coating increased with the increase of Mo2N content. In the abrasion process, the evenly distributed ultramicro Mo2N particles play the dispersion strengthening and self-lubricating role in the coating.
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Authors: Hirota Ken, Takaoka Katsuya, Murase Yasushi, Kato Masaki
Abstract: Synthesis of dense materials with the compositions of Al2O3/Mo2N=100/0 ~ 40/60 vol% has
been attempted directly from Al2O3/Mo mixed raw powder compacts using capsule-free N2 hot
isostatic pressing (HIP). During HIPing [1500°C/(16~20)MPa]/1h], solid/gas reaction between Mo
and N2 was introduced to form Mo2N. Most sintered composites consisting of only Al2O3 and Mo2N
phases reached a higher relative density than 98.0% with closed pores nevertheless capsule-free
HIPing. Distribution of Mo2N particles just formed suppressed the grain growth of Al2O3 during
sintering. Mechanical properties, such as bending strength (Σb), Vickers hardness (HV), fracture
toughness (K1C), and other properties have been evaluated as a function of their compositions. The
best mechanical values of Σb (c.a. 573 MPa), HV (c.a. 20.3 GPa) and K1C (c.a. 5.00 MPa・m1/2) were
attained at the composition of Al2O3/Mo2N=90/10 vol%, due to a high density (98.6%) and small
grain size of Al2O3 matrix (Gs c.a. 4.70 μm). Further addition of Mo2N reduced the sinterability of
matrix grains, resulting in low densities of around 90% at the 40/60 vol% composition.
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Authors: S. Mondal, A.K. Banthia
Abstract: Nitrides remain a relatively unexplored class of materials primarily due to the difficulties
associated with their synthesis and characterization. Several synthetic routes, including high
temperature reactions, microwave assisted synthesis, and the use of plasmas, to prepare binary and
ternary nitrides have been explored. Transition metal nitrides form a class of materials with unique
physical properties, which give them varied applications, as high temperature ceramics, magnetic
materials, superconductors or catalysts. They are commonly prepared by high temperature
conventional processes, but alternative synthetic approaches have also been explored, more recently,
which utilize moderate temperature condition. Transition metal nitrides particularly, molybdenum
nitride, niobium nitride, and tungsten nitride have important applications as catalyst in
hydrodenitridation reactions. These nitrides have been traditionally synthesized using high
temperature nitridation treatments of the oxides. The nitridation temperatures are very high (> 800-
1000 oC).
The aim of our work is to synthesize molybdenum nitride by a simple, low-temperature route. The
method involves pyrolysis of a polymeric precursor, which was prepared from the condensation
reaction between triethanolamine and molybdic acid. The melting point of the product is 180oC.
The polymeric precursor and its pyrolyzed products are characterized by Fourier transform infrared
spectroscopy (FTIR) and X-ray diffraction (XRD). X-ray diffraction shows that molybdenum nitride
(MoN) obtained from this method has hexagonal crystal structure. MoN is obtained by this method
at very low temperature (~ 400 oC).
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Abstract: Thin films of molybdenum nitride (MoNx with 0≤x≤0.35) were deposited on Si(100) at room temperature using reactive DC magnetron sputtering. The residual stress of films was measured as a function of sputtering pressure, nitrogen incorporation, and annealing temperature by wafer curvature-based technique. It was found that the stress of the films was strongly related to their microstructure, which depended mainly on the incorporation of nitrogen in the films. The film stresses without nitrogen addition strongly depended on the argon pressure and changed from highly compressive to highly tensile in a relatively narrow pressure range of 0.8-1.6 Pa. For pressures exceeding ~5.3 Pa, the stress in the film was nearly zero. Cross-sectional transmission electron microscopy indicated that the compressively stressed films contained a dense microstructure without any columns, while the films having tensile stress had a very columnar microstructure. High sputtering-gas pressure conditions yielded dendritic-like film growth, resulting in complete relaxation of the residual tensile stresses. It was also found that the asdeposited film was poorly ordered in structure. When the film was heated at ~775 K, crystallization occurred and the stress of the film drastically changed from –0.75 to 1.65 GPa.
The stress development mechanism may be due to volumetric shrinkage of the film during crystallization.
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