Authors: Hao Hu, Kari Ullakko
Abstract: The goal of this study is to make selective etch possible for the next generation of MEMS(microelectromechanical systems) devices that are composed Ni-Mn-Ga and silicon layers. Due tothe large magnetic-field-induced strains of Ni-Mn-Ga, sensing and actuating components can be fab-ricated in the Ni-Mn-Ga layers. Other functional components can be manufactured in the silicon layer.Single crystalline Ni-Mn-Ga alloys that are grown by using the Bridgman vertical growth techniquehave so far obtained the largest magnetic field-induced strain (MFIS), a magnetic shape memory(MSM) effect. Similar to silicon wafers, Ni-Mn-Ga wafers are also sliced from crystal-oriented singlecrystalline ingots. To fabricate hybrid MEMS devices such as micromanipulators and robots, lab-on-chip containing micropump manifolds and valves, or vibration energy harvesters, the fabricationprocesses used for MEMS devices will be also used to fabricate components in the Ni-Mn-Ga layer ofthe hybrid MEMS devices. One of the most important processes for MEMS fabrication is the structur-ing of materials by chemical etching. The main goal of this study is to obtain evidence that the etchantetches silicon but not Ni-Mn-Ga and to identify an etchant that etches Ni-Mn-Ga but not silicon. Thepresent paper reports on a novel experiment in dissolving Ni-Mn-Ga alloys. An etchant compositionof 69% HNO3, 98% H2SO4, and CuSO4•5H2O is proposed for dissolving Ni-Mn-Ga alloys and thevariation in the dissolution rate by adjusting the concentrations of HNO3 and ultrapure water (UPW)is demonstrated. This etchant was demonstrated to etch Ni-Mn-Ga but not silicon. The HF+HNO3acidic solution commonly used for etching silicon does not dissolve Ni-Mn-Ga alloys.
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Authors: Martin Zelený, Ivo Dlouhý
Abstract: The influence of Co and Cu doping on Ni-Mn-Ga alloy is investigated using the different ab initio methods for description of chemical disorder. The exact muffin-tin orbital method in combination with the coherent-potential approximation provides almost identical profiles of total energies along the tetragonal deformation path compared to the supercell approach used within the projector-augmented wave method. On the other hand, the simple virtual crystal approximation exhibits different results and thus it is not able to describe doping in Ni-Mn-Ga alloy properly.
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Authors: Oleg Heczko, Vít Kopecký, Jan Drahokoupil, Marek Vronka, Oleksiy Perevertov, Jaromír Kopeček
Abstract: Magnetic shape memory effect is general name for several effects in which the most visible feature is huge strain induced by magnetic field. Magnetic field-induced structure reorientation (MIR) occurs due to motion of twin boundaries in single phase. As the magnetic field is a relatively weak force compared with mechanical stress, very high mobility of twin boundaries is crucial. Here we study the properties of martensite relevant for this effect using X-ray diffraction, optical and electron microscopy, magnetic observation and mechanical testing. In 10M modulated martensite, two types of mobile twin boundary (type I and type II) are observed with complex layered microstructures consisting of a hierarchy of twinning systems. We search for analogue with non-magnetic Cu-Ni-Al shape memory alloy.
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Abstract: The study explores the vibration sensing effect of Ni-Mn-Ga shape memory alloy, based on the experimental results, researched the characteristics of this alloy applied in mechanical vibration signal sensors, and describes the feasibility of this alloy used for vibration measurements.
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Authors: Krystian Prusik, Katarzyna Reclik, Danuta Stróż, Tomasz Goryczka, Józef Lelątko, Wojciech Gurdziel
Abstract: Two Ni-based (Ni-Mn-Ga and Ni-Mn-Co-In) ferromagnetic nonstoichiometric shape memory alloys were studied in order to determine the influence of hot extrusion process on macro, microstructure and texture of the studied alloys. The microstructure of the alloys in the as cast state and after extrusion was analyzed by electron backscatter diffraction technique. Typical microstructure of the as cast alloys consisted of radially oriented columnar grains elongated perpendicularly to the casting axis. For the alloys Ni-Mn-Ga and Ni-Mn-Co-In alloys the 10M and 14M modulated martensite were observed, respectively. After extrusion Ni-Mn-Ga samples revealed high density of fibre texture parallel to the extrusion axis. In spite of applying different extrusion parameters it was not possible to avoid cracks and overcome the brittleness of the Ni-Mn-Co-In alloys.
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Authors: Patrick Ochin, Andrii V. Gilchuk, Gennady E. Monastyrsky, Yuri Koval, Anatolij A. Shcherba, Sergij N. Zaharchenko
Abstract: Ni-Mn-Ga-based magnetic shape memory materials were elaborated by spark plasma sintering method. Micron sized particles were prepared by spark-erosion method in liquid argon and liquid nitrogen from preliminary melted magnetic shape memory master alloys Ni-28.5Mn-22.5G at.%. Powders were annealed in H2 gas atmosphere before sintering. Depending on the cryogenic liquids the morphology of particles alternated between spherical solid and hollow balls. The conditions of spark eroded powder elaboration strongly effect on the morphology, martensitic behavior, and structure of sintered samples. In particularly, martensite has 5M structure in bulk material; 14M and non-modulated martensites were found in annealed powders and sintered compacts correspondingly.
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Abstract: Temperature characteristics are essential to reasonable application of Ni-Mn-Ga alloy. This paper reports an experiment equipment which is used as the research of variable temperature effect. The relationship between deformation rate and temperature is studied. Dynamic and static experiments are done. The results show that critical temperature is around 40°C. It can be predicted that thermo-elasticity and magnetically-controlled characteristics will disappear with the increase of temperature.
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Authors: Ilkka Aaltio, Outi Söderberg, Yan Ling Ge, Simo Pekka Hannula
Abstract: Martensitic 10M Ni-Mn-Ga single crystals are usually applied in the magnetomechanical actuators. Their behavior in the long-term cycling and the factors influencing upon are thus important to know. There are several publications concerning this. However, consistent statistical data is still missing to large extent. In this report we review and analyze the data available in the literature. In conclusion it can be stated that 10M Ni-Mn-Ga single crystals survive well in long-term actuation (millions of cycles) when the frequency of twin variant reorientation is not exceeding 250 Hz, and the strain used in actuation is below 3 %. There are several factors influencing the long-term behavior and these are discussed in more details in this work.
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Authors: Markus Chmielus, Peter Müllner
Abstract: We study the effect of surface modifications and constraints on the mechanical properties of Ni-Mn- Ga single crystals, which are imposed by (i) structural modifications near the surface, (ii) mounting to a solid surface, and (iii) guiding the stroke. Spark eroded samples were electropolished and characterized before and after each polishing treatment. Surface damage was then produced with spark erosion and abrasive wearing. Surface damage stabilizes and pins a dense twin-microstructure and prevents twins from coarsening. The density of twins increases with increasing degree of surface deformation. Twinning stress and hardening rate during mechanical loading increase with increasing surface damage and twin density. In contrast, when a damaged surface layer is removed, twinning stresses, hardening rate, and twin density decrease. Constraining the sample by mounting and guiding reduces the magnetic-field-induced strain by locking twins at the constrained surfaces. . For single-domain crystals and for hard magnetic shape-memory alloys, external constraints strongly reduce the magnetic-field-induced strain and the fatigue lifetime is short. In contrast, for selfaccommodated martensite and for soft magnetic shape-memory alloys, the twin-microstructure adapts well to external constraints and the fatigue lifetime is long. The performance of devices with MSMA transducers requires managing stress distributions through design and control of surface properties, microstructure, and constraints.
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Authors: Franca Albertini, Simone Fabbrici, Antonio Paoluzi, Jiri Kamarad, Zdenek Arnold, Lara Righi, Massimo Solzi, Giacomo Porcari, Chiara Pernechele, David Serrate, Pedro Algarabel
Abstract: We review the composition dependence of the structural and magnetic properties of the Co-doped Ni–Mn–Ga Ferromagnetic Shape Memory Alloy around the Mn-rich composition Ni50Mn30Ga20. The presence of Co affects the critical temperatures and alters the exchange interactions of martensite and austenite to different extents; by varying the composition it is possible to tune the critical temperatures and to induce a “paramagnetic gap” between the magnetically ordered martensite and magnetic austenite, thus giving rise to a reverse magnetostructural transformation. The magnetic and structural properties display noticeable discontinuities across the martensitic transformation: remarkable values of the saturation magnetization jump at the transformation (DM), of the field dependence of the martensitic transformation temperature (dTM/dH), and of the crystalline volume change (DV/V) are reported, and are considerably enhanced by additional Indoping of the quaternary alloy. These properties give rise to a remarkable phenomenology which is of interest for multifunctional applications; magnetic superelasticity and high values of reversible strain are found.
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