Articles by keyword: «Non-Uniformity»

An Analysis of the Pad Deformation for Improved Planarization
Published in: Advances in Abrasive Technology V (p241)
Change of Properties of CMOS Image Sensor Irradiated with 9 and 16 MeV Protons
Published in: Defects and Diffusion in Semiconductors X (p7)
Characterization of SiC Epitaxial Wafers by Photoluminescence under Deep UV Excitation
Published in: Silicon Carbide and Related Materials 2001 (p597)
Development and Investigation on EBAS-100 of 100 mm Diameter Wafer for 4H-SiC Post Ion Implantation Annealing
Published in: Silicon Carbide and Related Materials 2005 (p807)
Development of Substructure Non-Uniformity under Equal-Channel Angular Pressing
Published in: PRICM 6 (p839)
Effect of Conditioning Parameters on Surface Non-Uniformity of Polishing Pad in Chemical Mechanical Planarization
Published in: Advances in Abrasive Technology XI (p498)
Essential Aspects of Chemical Mechanical Planarization for Oxide Semiconductor
Published in: Precision Machining of Advanced Materials (p1)
Influence of Micro-Inhomogeneities on the Electron Mobility in Undoped N-Type LEC GaAs
Published in: Defects in Semiconductors 17 (p1565)
Measuring Surface Uniformity in Chemical Mechanical Polishing
Published in: Advances in Abrasive Technology XII (p459)
Nonuniformity of the Electrical Properties in SiC Micro Thermistors
Published in: Electroceramics in Japan II (p75)