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Articles by keyword: «Ozonated Water»

• Cleaning Capability of High Concentration Ozonated Water
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p305)
• New FEOL Cleaning Technology for Advanced Devices beyond 45 nm Node
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p185)
• New Method to Generate the High Concentration Ozonated Water by Using the Ultrapure Water of the Semiconductor Factory
  Published in: Ultra Clean Processing of Silicon Surfaces V (p219)
• New Residue Removal Method Using Ozonated Water with Phosphoric Acid
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p219)
• Uniform Ultrathin Oxide Growth for High-k Preclean
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p15)