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Articles by keyword: «PECVD»

• A Comparison of the Surface Properties of DLC and Nanocrystalline Diamond
  Published in: High-Performance Ceramics IV (p1776)
• A Silicon Oxide Hard Coating Deposited on Flexible Substrate by TMS - PECVD System
  Published in: Progress on Advanced Manufacture for Micro/Nano Technology 2005 (p439)
• An Advanced LOCOS-Process for the Sub-50 nm-Region Using Low-Stress PECVD-Silicon Nitrides
  Published in: Journal of Nano Research Vol. 6 (p23)
• Annealing of a-Si:H Thin Film by Rapid Thermal Process
  Published in: Liquid Crystals and Related Materials II (p409)
• Batch Processing Method to Deposit a-Si:H Films by PECVD
  Published in: Advanced Materials Forum II (p104)
• Behavior of Various Organosilicon Molecules in PECVD Processes for Hydrocarbon-Doped Silicon Oxide Films
  Published in: Advances in Nanomaterials and Processing (p347)
• Boron-Doped Nanocrystalline Silicon Thin Films Prepared by PECVD
  Published in: Micro-Nano Technology XIII (p386)
• Characterization of a-C:H Thin Films Deposited from C₂H₄ by PECVD Microwave Discharge
  Published in: Thin Films and Porous Materials (p49)
• Characterization of SiOF Thin Films Deposited by PECVD from Hexamethyldisiloxane in Mixture with Oxygen and CF₄
  Published in: Thin Films and Porous Materials (p59)
• Comparative Study on Metallization and Passivation Materials for High Temperature Sensor Applications
  Published in: Silicon Carbide and Related Materials 2010 (p449)
• Comparison between the Piezoresistive Properties of a-SiC Films Obtained by PECVD and Magnetron Sputtering
  Published in: Silicon Carbide and Related Materials 2010 (p217)
• Correlation between Deposition Rate and Hardness of Remote PECVD Silicon Oxide Films
  Published in: Trends and New Applications of Thin Films (p389)
• Crystallization of Hydrogenated Amorphous Silicon by Rapid Thermal Method
  Published in: Advances in Liquid Crystals (p444)
• Deposition and Characterization of GaN Films on ITO Glass Substrates by PECVD
  Published in: Materials Research (p446)
• Effect of C₂H₂ Flow Rate on the Deposition of Zr-ZrC-ZrC/DLC Gradient Nano-Composite Film on Biomedical NiTi Alloy
  Published in: Materials Research (p1308)