Papers by Keyword: Patterned

Abstract: The use of various H₂O₂ based chemistries for TiW etch was studied on single wafer and wet bench tools. The focus of the investigation was put on the different behaviors of these chemicals on blanket and patterned wafers. The results of the etch rate tests showed much higher values on the wafers where copper was exposed, leading to the hypothesis that the etch rate on TiW should be driven by the catalysis effect of the transition metal on the H₂O₂ decomposition reaction. Additional optical inspections, ToF SIMS, SEM and TEM analyses were carried out to confirm this hypothesis and find the best conditions in terms of morphology for RDL applications. Finally, the collected data were also used to evaluate the process cycle time and cost of ownership.

Abstract: The synthesis of graphene using chemical vapor deposition (CVD) on patterned Cu thin films was studied. A series of experiments were carried out to optimize the CVD process of graphene synthesis on Cu thin films and the optimal growth conditions were obtained. Consequently, few-layer graphene which had been characterized by optical microscopy and Raman spectroscopy atomic was synthesized. Conductive atomic force microscopy (AFM) was used to measure the conductivity of metal-graphene contact samples and the result showed that the conductivity of CVD synthesized graphene on Cu thin films is higher than the transferred graphene on same Cu thin films, which was synthesized on 25 μm Cu foils by conventional CVD method.

Abstract: β-SiC/SiO₂ core-shell NWs have been synthesized on patterned silicon wafers in a CVD system, using carbon oxide as single precursor and nickel nitrate as catalytic element, in nitrogen or argon atmosphere at 1100°C. The coaxial structure and the crystallinity of the NW core are examined by (scanning) transmission electron microscopy. The patterning of the substrate allows to grow NWs in selected areas only, as imaged by SEM. Cathodoluminescence (CL) panchromatic images of the same areas point out that the light emitted under electron excitation is localized only in the area covered with NWs. The room-temperature CL spectrum has three different components peaked at 2.45 eV, related to the 3C-SiC near-band-edge emission, and at 2.75 and 3.75 eV, that are induced by the triplet and singlet states of oxygen-deficiency centers ODC(II) in silicon dioxide shell.

Abstract: In this paper, a new approach for controllable bio-fabrication of patterened cellulose nano-fibers has been proposed by micro-fluidic techniques, via the combination of biological technology and nanotechnology. We attempted to make sure whether A. xylinum can regularly move within micro-fluidic channels and further to clarify how the flow can direct and control the assembly of cellulose nano-fibers. The movement of A. xylinum within the micro-fluidic channels was observed in vivo by real time video microscopy. The well-patterned materials have great potential utility in tissue engineering.