Articles by keyword: «Planarization»
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Simulation of Planarization of Rectangular Glass Plate Using Tool-Path-Control-Type Polishing
Published in: Advances in Abrasive Technology XII (p313) -
Study on Chemical Mechanical Polishing with Ultrasonic Vibration
Published in: Advances in Abrasive Technology XIII (p311) -
Study on CMP Slurry and Technique of Silicon Dioxide Dielectric for ULSI
Published in: Surface Engineering (p798) -
TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching
Published in: Silicon Carbide and Related Materials 2010 (p489)