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Articles by keyword: «Plasma Processing»

• Low-k Integration Using Metallic Hard Masks
  Published in: Ultra Clean Processing of Semiconductor Surfaces X (p193)
• Material Processing Using Supersonic Reactive Plasma Jets in Thermodynamical and Chemical Nonequilibrium State
  Published in: New Frontiers of Processing and Engineering in Advanced Materials (p303)
• Mechanical Properties of Two MIM Processed Nickel-Based Superalloys
  Published in: Advanced Powder Technology VI (p252)
• Oxygen Plasma Processing of Silicon and Silica Substrates for Thin Films of Polymer Blends
  Published in: Functional Nanomaterials for Optoelectronics and other Applications (p175)
• Plasma Characteristics of Supersonic Nitrogen/Hydrogen-Mixture and Ammonia Plasma Jets and Nitrided Material Properties
  Published in: Designing, Processing and Properties of Advanced Engineering Materials (p373)
• Plasma Etching for Backside Wafer Thinning of SiC
  Published in: Silicon Carbide and Related Materials 2006 (p729)
• Shortening of Plasma Strip Process Resulting in Better Removal of Photo Resist after High Dose Implantation
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p265)
• Silicon Films Produced by PECVD under Powder Formation Conditions
  Published in: Plasma Processing and Dusty Particles (p21)