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CONFERENCE
12/9/2012 - 12/12/2012
ACAM7: The 7th Australasian Congress on Applied Mechanics
11/16/2012 - 11/18/2012
2nd International Conference on Manufacturing Engineering and Automation (ICMEA2012)
11/16/2012 - 11/18/2012
more...
Articles by keyword: «
Polishing Pad
»
21 papers on 2 pages:
1
[2]
[next]
A New Polishing Pad of EVA-Adhesive-Dressed-with-SiC-Grits Polishing Face and its Applications in Silicon Wafer Polishing
Published in:
Advances in Abrasive Technology XIII
(p539)
A Study of Nano-Polishing of Injection Molds Using a Fixed Abrasive Pad
Published in:
Advances in Abrasive Technology V
(p247)
A Study on the Manufacture of the Next Generation CMP Pad with a Uniform Shape Using the Micro-Molding Method
Published in:
Advances in Abrasive Technology VI
(p413)
Achieving High Flatness of Workpiece Edge Shape by Considering Polishing Pressure
Published in:
Advances in Precision Engineering
(p71)
An Analysis of the Pad Deformation for Improved Planarization
Published in:
Advances in Abrasive Technology V
(p241)
Chemical Mechanical Polishing of Transparent Nd:YAG Ceramics
Published in:
Advances in Machining & Manufacturing Technology IX
(p278)
Dressing Behaviors of PCD Conditioners on CMP Polishing Pads
Published in:
Advances in Abrasive Technology XII
(p201)
Effect of Conditioning Parameters on Surface Non-Uniformity of Polishing Pad in Chemical Mechanical Planarization
Published in:
Advances in Abrasive Technology XI
(p498)
Effect of Dressing Load and Speed on Removal Rate in the Chemical Mechanical Polishing Process
Published in:
Recent Trends in Materials and Mechanical Engineering Materials, Mechatronics and Automation
(p832)
Fabrication of Ultra-Fine Abrasive Polishing Pads by Gel Technique
Published in:
Advances in Materials Manufacturing Science and Technology II
(p468)
Friction Phenomenon in Chemical Mechanical Polishing of Oxide Film
Published in:
Advances in Abrasive Technology XIII
(p320)
Influences of Machining Parameters on Silicon Wafer Polished with Gel-Coupled Ultra-Fine Abrasive Polishing Pads
Published in:
Advances in Grinding and Abrasive Technology XIV
(p279)
Investigation of a Polishing Pad and a Carrier Film for Decreasing Edge Roll Off of Workpiece
Published in:
Advances in Abrasive Technology XIV
(p476)
Investigation of Shear and Thermal Characteristics of Polishing Interface in Soft Pad Polishing Process
Published in:
Recent Trends in Materials and Mechanical Engineering Materials, Mechatronics and Automation
(p508)
Mechanical Mechanisms of Chemical Mechanical Polishing
Published in:
Multi-functional Materials and Structures
(p1486)
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