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Keyword: "Pyrogenic Oxidation"
Papers by keyword:
Paper Title Page

Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures

Authors: Masahito Yoshikawa, Kazutoshi Kojima, Takeshi Ohshima, Hisayoshi Itoh, Sohei Okada, Yuuki Ishida

1129

Fabrication of Double Implanted (0001) 4H-SiC MOSFETs by using Pyrogenic Re-Oxidation Annealing

Authors: Ryouji Kosugi, Norihiko Kiritani, Kenji Suzuki, Tsutomu Yatsuo, Kazuhiro Adachi, Kenji Fukuda

1397

Photoemission Spectroscopic Studies on Oxide/SiC Interfaces Formed by Dry and Pyrogenic Oxidation

Authors: Yasuto Hijikata, Hiroyuki Yaguchi, Yuuki Ishida, Masahito Yoshikawa, Toshio Kamiya, Sadafumi Yoshida

1341

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