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Articles by keyword: «RTP»

• A Growth Kinetics Model for the Radical Oxidation of Silicon
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p147)
• A Monte Carlo Model for Analyzing the Effects on Radiometric Temperature Measurement in Rapid Thermal Processor
  Published in: Progress on Advanced Manufacture for Micro/Nano Technology 2005 (p325)
• A No-Reference Quality Assessment System for Video Streaming over RTP
  Published in: Materials Science and Engineering (p243)
• An Overview of ms Annealing for Deep Sub-Micron Activation
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p257)
• Characterization of Nitrided Gate Oxide Formed by RTP for SiC MOSFET Application
  Published in: Advances in Innovative Materials and Applications (p221)
• Conduction Heating in RTP Fast, and Pattern-Independent
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p375)
• Defects Induced in Silicon by Rapid Thermal Processing
  Published in: Physical Chemistry of Solid State Materials (p361)
• Development and Investigation on EBAS-100 of 100 mm Diameter Wafer for 4H-SiC Post Ion Implantation Annealing
  Published in: Silicon Carbide and Related Materials 2005 (p807)
• Evolution of Commercial RTP Modules
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p21)
• Fabrication of 4H-SiC DIMOSFETs by High-Temperature (>1400ºC) Rapid Thermal Oxidation and Nitridation Using Cold-Wall Oxidation Furnace
  Published in: Silicon Carbide and Related Materials 2005 (p1309)
• Gettering of Metallic Impurities by Rapid Thermal Processing
  Published in: Physical Chemistry of Solid State Materials (p649)
• High Temperature Rapid Thermal Oxidation and Nitridation of 4H-SiC in Diluted N₂O and NO Ambient
  Published in: Silicon Carbide and Related Materials 2004 (p669)
• High Temperature RTP Application in SOI Manufacturing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p61)
• Implant Annealing – An Evolution from Soak over Spike to Millisecond Annealing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p207)
• Measurement of the Normalized Recombination Strength of Dislocations in Multicrystalline Silicon Solar Cells
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p701)