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Articles by keyword: «Selective Etching»

• Advances on 45nm SiGe-Compatible NiPt Salicide Process
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p211)
• Development of New Methods for Fine-Wiring in Si Using a Wet Catalytic Reaction
  Published in: Technology Evolution for Silicon Nano-Electronics (p129)
• Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers
  Published in: Silicon Carbide and Related Materials 2001 (p327)
• Improved Ghost Plating of Light-Induced Plating on Crystalline Silicon Solar Cells by SiO₂/SiN Selective Etching
  Published in: Frontiers of Green Building, Materials and Civil Engineering (p2290)
• Peracetic Acid as Active Species in Mixtures for Selective Etching of SiGe/Si Layer Systems – Aspects of Chemistry and Analytics
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p79)
• Selective Etching of Micropipes During Initial Homoepitaxial Growth Stage on Nearly On-Axis 4H-SiC Substrates
  Published in: Silicon Carbide and Related Materials 2005 (p207)