Papers by Keyword: SiC Bulk Crystal Growth

Paper TitlePage

Abstract: In this paper, we present for the first time an in-situ 3-D reconstruction of the SiC crystal growth interface using X-ray computed tomography (CT). We show that the shape of the growth interface can be determined with high precision at growth temperatures above 2100 °C in a conventional 3” PVT (physical vapor transport) growth system.
27
75
Showing 1 to 2 of 2 Paper Titles