Papers by Keyword: SiO_x Film

Abstract: In the Current Study, the Structural Characteristics of Siox Thin Films Grown by Magnetron Sputtering on Si Substrates Are Reported. High Resolution Transmission Electron Microscopy Revealed the Formation of Amorphous Siox Films for the as-Deposited Samples, as Well as the Ones Annealed in Ambient Air for 30 Min at 950oC and of Si Nanocrystals, Embedded in Amorphous Siox, after Ar Annealing for 1-4 Hours at 1000oC. the Nanocrystals, with Sizes up to 6 Nm, Predominately Exhibit {111} Lattice Planes. Energy-Dispersive X-Ray Analysis Showed that the Si/O Ratio Is between 0.5-1, I.e. the Amorphous Films Comprise of a Mixture of Sio2 and Sio. Phase Images and Corresponding Strain Maps Created Using Fourier Filtering Revealed a Uniform Contrast in the Nanocrystals, which Shows that the Si Lattice Constant Does Not Vary Significantly. the Residual Strain Variations, around 4%, May Account for the Possible Existence of a Small Percentage of Highly Disordered Si or Siox Residual Clusters inside the Regular Si Matrix, in Full Agreement with Photoluminescence Measurements Performed on the same Materials.

Abstract: Silicon suboxide, SiOx thin films with different oxygen contents (1.15≤x≤1.70) were prepared by thermal evaporation of silicon monoxide at a residual oxygen pressure of 1·10-3 Pa and deposition rates of 0.2, 1.0, 3.0 and 6.0 nm/s. Rapid thermal annealing (RTA) of films was carried out at 1100°C in vacuum for 15 and 30 s and the films were analyzed by infrared (FTIR) and photoluminescence (PL) spectroscopy. In the FTIR spectra of SiOx annealed samples, a blue-shift of the stretching band with initial oxygen content, x, is observed. This band is shifted to a much lower frequency with prolonged RTA time. This behavior can be interpreted in terms of the partial decrease of oxygen content and film density upon annealing in vacuum. With annealing time increase a new band at 1106 cm-1 appears. Therefore, infrared spectra of SiOx films are significantly affected by the oxygen content. PL spectra of these films also change drastically with increasing annealing time. In the PL spectra of films annealed for 15 s two bands are easily visible: broad redorange band at 2.2 eV and a green band at 2.4 eV, while for 30 s annealing only low-energy band exists. Green band is connected with the defects in the SiOx matrix while red-orange band can be deconvoluted into several bands at 2.0, 2.3 and 2.5 eV. Two types of defects can be responsible for the PL band at about 2 eV: defects in a-Si (amorphous silicon) nanoparticles separated during RTA, and nonbridging oxygen hole recombination centers (NBOHC) formed by loosing of oxygen during RTA. The PL band at 2.3 eV is associated with the defects formed at a-Si/SiOx interfaces while a hardly visible band at 2.5 eV is related to the defects connected with the oxygen deficiency formed in the SiOx matrix during RTA.

Abstract: Constraction and characteristics of sorption polymeric relative humidity sensors, sorption SiOx microhumidity sensors, and condensation type (dew point) sensors are compared. The characteristics of the sensors are examined in dew point range from -80 to +20oC. An integrated multifunctional humidity sensor, for measurements in wide humidity range at different conditions is developed. The sensors are intended for use in various branches of industry, and in scientific researches.