Articles by keyword: «Silicon Wafer»
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The Mechanism of Polymer Particles in Silicon Wafer CMP
Published in: Advances in Materials Manufacturing Science and Technology XIII Volume I (p231) -
The Performance and Optimization of Slurry on the Double Sided Polishing Process of Silicon Wafer
Published in: Advances in Grinding and Abrasive Technology XIV (p324) -
Thermoelectric Properties of 3C-SiC Produced by Silicon Carbonization
Published in: Silicon Carbide and Related Materials 2001 (p763) -
Ultrasonic Welding of Aluminum and Silicon Wafer
Published in: Progress on Advanced Manufacture for Micro/Nano Technology 2005 (p841) -
Vibration Analysis of ID Slicing Process and Wafer Measurement
Published in: Advances in Machining & Manufacturing Technology VIII (p641) -
Wafer Polishing Process with Signal Analysis and Monitoring for Optimum Condition of Machining
Published in: Advances in Abrasive Technology XIII (p295)