Keyword: "Spectroscopic Ellipsometry (SE)"
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Advanced Real Time Metrology of AlGaN/GaN and InGaN/GaN Epitaxy

Authors: Tong Ho Kim, Soo Jeong Choi, April S. Brown, Maria Losurdo, Giuseppe Valerio Bianco, Maria M. Giangregorio, Giovanni Bruno

124

Application of the Spectroscopic Ellipsometry for the CoSi2 Silicide Formation Induced by Thermal Annealing of Co/Si Multilayered Films

Authors: Y.V. Kudryavtsev, Sergey I. Sidorenko, Yu.N. Makogon, E.P. Pavlova, T.I. Verbitskaya, Y.P. Lee, Y.H. Hyun, V.A. Oksenenko

572

Characterization of 4H-SiC–SiO2 Interfaces by a Deep Ultraviolet Spectroscopic Ellipsometer

Authors: H. Seki, T. Wakabayashi, Yasuto Hijikata, Hiroyuki Yaguchi, Sadafumi Yoshida

505

Characterization of Oblique Deposited Nanostructured SiOx Films by Ellipsometric and IR Spectroscopies

Authors: A. Szekeres, E. Vlaikova, T. Lohner, Attila Lajos Tóth, I.P. Lisovskyy, S.O. Zlobin, P.E. Shepeliavyi

149

Characterization of the Interfaces between SiC and Oxide Films by Spectroscopic Ellipsometry

Authors: Yuichi Tomioka, T. Iida, M. Midorikawa, H. Tukada, K. Yoshimoto, Yasuto Hijikata, Hiroyuki Yaguchi, Masahito Yoshikawa, Yuuki Ishida, Ryouji Kosugi, Sadafumi Yoshida

1029

Effect of Chemical Solution on the Stability of Low-k Films

Authors: Els Kesters, Quoc Toan Le, Mikhail R. Baklanov, Werner Boullart, Paul W. Mertens

349

Effect of Redistribution of the Optical Spectral Weight in CuO Nanostructured Ceramics

Authors: A.A. Makhnev, L.V. Nomerovannaya, Boris A. Gizhevskii, Sergey V. Naumov, Natalia V. Kostromitina

285

Effect of UV-Irradiation on Anodized Films Formed on Titanium in 0.1M H2SO4 Solution

Authors: Yu Hong Yao, Hiroshi Nanjo, Jiang Nan Liu, Zheng Bin Xia, Zheng Pin Wang, Jian Feng Wei

208

Effects of Ion Bombardment upon Microcrystalline Silicon Growth

Authors: Billel Kalache, R. Brenot, V. Tripathi, Satyendra Kumar, R. Vanderhaghen, Pere Roca i Cabarrocas

71

Electronic Properties of Wet-Chemically Prepared Oxide Layers

Authors: Heike Angermann, W. Henrion, M. Rebien

181

Showing 1 to 10 of 36 Papers