Papers by Keyword: Super-Smooth Surface

Abstract: Nanoparticle colloid hydrodynamic cavitation jet polishing (HCJP) is a super-smooth machining technology. This technology utilizes the interface reaction to remove material from the workpiece and uses cavitation effect to improve the processing efficiency. In this paper, the prototype equipment of HCJP is researched. Based on the prototype equipment, the processing experiments of pulsed jet nozzle, swirling jet nozzle and common cone-shaped nozzle have been done and the results of the experiments are compared with each other. The experiment results indicate that the roughness of the surfaces polished by three nozzles has remarkably decreased. The material removal rate of pulsed jet nozzle is the highest among the three types of nozzles. The material removal rate of the swirling jet nozzle is not improved obviously compared with the common cone-shaped nozzle. The processing experiment of monocrystalline silicon by the pulsed jet nozzle has been done and the roughness of processed surface is Ra 0.475 nm.

Abstract: Influence of the cutter rake angle to the surface quality of crystal KDP is analyzed theoretically in this paper. Analysis result shows that the tension stress reaches minimum in the crystal KDP cutting region and optimal value of the surface quality is obtained as cutter rake angle is about -45°. Cutting experimental of different cutter rake angle is realized on the machine tool. Experimental results show that the surface roughness of the crystal KDP reach minimum (rms is 6.521nm, Ra is 5.151nm) as the cutter rake angle is about -45°, this experiment certifies the correctness of this theory analysis. Theory analysis and experimental results show that influence of the cutter rake angle to surface quality of the crystal KDP is very large, for ultra-precision machining of the crystal KDP, when large negative rake diamond cutter (-45°) is adopted, the super-smooth surface can be obtained.

Abstract: A theoretical analysis on the variation regularity of cutting force caused by the material anisotropy with different orientation of KDP is analyzed firstly; influence and regularity of the variation are obtained. Analysis result shows that the crystal anisotropy of KDP is an important factor in obtaining the super-smooth surface. Then experiments are realized on the machine tool, results afford the variation regularity of cutting force caused by the anisotropy with different orientation of KDP, which certifies the correctness of this theoretical analysis. For ultra-precision machining of the KDP at large negative rake diamond cutter (-45°) and the optimal parameters, the super-smooth surface (rms is 8.702 nm, Ra is 6.895 nm) can be obtained on the plane (001).

Abstract: The ultra-precision lapping processes to obtain the damage-free surfaces at Å level surface roughness of Potassium titanyl phosphate (KTiOPO4, KTP) crystal is studied in this paper. The influence of the lapping parameters on the stoke removal rate and surface roughness and material removal mechanism in the process of ultra-precision lapping process is discussed, and the evolution of the lapped surface is also observed with electric telescope. A super-smooth surface of quartz crystal with roughness Ra 0.8667 Å has been obtained by adopting the fine SiO2 abrasive powders and the elastic polyurethane pad in this study.