Papers by Keyword: TCS

Abstract: Preparation and characteristics of amorphous silicon nitride (a-SiNx) thin films deposited by low pressure chemical vapor deposition (LPCVD) are investigated. Free gaseous radicals of trichlorosilane (TCS) and ammonia (NH3) are produced by passing each of the precursor gases separately over Pt-Ir/Al2O3 catalyst at the temperature of 600 C. Kinetics studies of the LPCVD are carried out in different total pressures, NH3/TCS flow rate ratios and temperatures. Surface topography, chemical concentrations, growth rate and thickness are studied by Ellipsometry, x-ray photo-electron spectroscopy (XPS), atomic force microscopy (AFM) and auger depth profiling (ADP). Analysis of experiments indicates that at the temperatures between 730 C and 830 C, the growth rate of thin films follows an Arrhenius behavior with activation energy of 166.3 KJ.mol-1. The measured hydrogen contamination in a-SiNx ultra thin films is 1.05 at% which is 17 times lower than the corresponding contamination in the films produced by (PECVD) and 3.4 times lower than the contamination in the LPCVD thin films with silane (SiH4) or dichlorosilane (DCS) and Ammonia. The surface topography of the prepared films is smooth and uniform and the thickness varies between 23 and 101 nanometers.

Abstract: In this paper, an in house production of a 0.5hp induction motor’s rotor is investigated. This investigation considers the induction motor’s efficiency and losses dissipation as an important aspect to determine the rotors efficiency. Through out this project, a new rotor which has 0.35mm steel sheet thickness and 10mm rotor bar slot size is constructed and compared with the existing rotor which has 0.50mm steel sheet thickness and 10mm rotor bar slot size. Once the construction phase of the rotor has been completed an in house motor experiment is done such as the no load, blocked rotor and dc resistance test. Result shows that thinner steel sheet (0.35mm) of the constructed rotor increase the efficiency up to 3.2% and reduces the losses to 17.2 watts compare to the thicker steel sheet rotor (0.5mm). An economical aspect is presented to show the amount of energy and money that can be saved from replacing the existing rotor (0.5mm) with a thinner rotor (0.35mm). As for the annual energy saving (AES) and total cost saving (TCS), the new rotor manage to save 138.7kWh per year and utility billing by RM45.51 per year per motor.