Keyword: "TED"
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Effects of Carbon Co-Implantation on Transient Enhanced Diffusion and Performances of the Phosphorus Doped Ultra-Shallow Junction Nano NMOSFET

Authors: Hung Yu Chiu, Yean Kuen Fang, Feng Renn Juang

98

High-Resolution Topography Analysis on Threading Edge Dislocations in 4H-SiC Epilayers

Authors: Isaho Kamata, Masahiro Nagano, Hidekazu Tsuchida, Yi Chen, Michael Dudley

305

Influence of the Surface Structure on the Growth of a Metallic Deposit on Oxide: Au/Al2O3 and Au/WO3

Authors: M. Gillet, C. Lemire, E. Gillet

103

Influence of Threading Dislocations on Lifetime of Gate Thermal Oxide

Authors: Kensaku Yamamoto, M. Nagaya, H. Watanabe, E. Okuno, T. Yamamoto, S. Onda

477

New Separation Method of Threading Dislocations in 4H-SiC Epitaxial Layer by Molten KOH Etching

Authors: T. Katsuno, Y. Watanabe, Fujiwara Hirokazu, Masaki Konishi, Takeo Yamamoto, Takeshi Endo

298

Solution Growth of Off-Axis 4H-SiC for Power Device Application

Authors: Ryo Hattori, Kazuhiko Kusunoki, Nobuyuki Yashiro, Kazuhito Kamei

179