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Articles by keyword: «Thickness Uniformity»

• Effect of the Thickness Uniformity in Micro-Electroforming Process by Dividing Conductive Zone on Cathode
  Published in: Micro and Nano Technology (p202)
• Growth of Thick Epitaxial 4H-SiC Layers by Chemical Vapor Deposition
  Published in: Silicon Carbide, III-Nitrides and Related Materials (p107)
• Highly Uniform Epitaxial SiC-Layers Grown in a Hot-Wall CVD Reactor with Mechanical Rotation
  Published in: Silicon Carbide and Related Materials 2001 (p187)
• Research of Film Uniformity on Vacuum Coating by Magnetron Sputtering with Multi-Sites
  Published in: Mechatronics and Information Technology (p1082)
• Smart-Cut Process for Ultrathin SOI Wafers Manufacturing
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p1)