Papers by Keyword: Titanium Oxynitride

Abstract: In this work, titaniumoxynitride (TiO_xN_y) thin films were deposited on glass slide substrates by using reactive dc magnetron sputtering technique. The reactive gas ratios between O₂ and N₂ were studied in the range of 15-30% with a constant of Ar gas at 110 sccm and a time of 120 minutes. Microstructure, optical, and electrical properties of TiO_xN_y thin films were analysis by using SEM, AFM, GIXRD, UV-VIS spectrophotometer, and 4-point probe measurements. We found that the thickness of the films decreases from 1.0 to 0.8 μm by increasing of O₂ gas ratios. The TiO_xN_y thin films have smooth surface related to small nanograin size. The roughness of the films slightly decreases when O₂ gas ratios increase. From optical transmission spectra, we observed that the transparent of the films increases with different O₂ gas ratio and shifts the band gap from 2.67 to 3.32 eV. The resistivity of the films obviously increases from 3.04 x 10^-3Ω-cm to 5.45 Ω-cm depending on O₂ gas ratio. These results indicate the phase changes of the TiO_xN_y films from metallic to oxide phases. The XRD spectra show poor crystalline TiN (220) and TiO₂ (021) at 15% of O₂ ratio and then the films become amorphous structure by increasing the O₂ gases. The O₂:N₂ gas ratios also affects to the different concentration of oxygen and nitrogen into the TiO_xN_y thin films that lead to the various structural, optical and electrical properties.

Abstract: This paper presents the results of study of the surface morphology of thin (~ 200 nm) biocompatible coatings based on titanium oxide and oxynitride deposited by reactive magnetron sputtering for vascular stents made from stainless steel. The analysis of the roughness of the coating surface was performed for describe qualitatively their topography.

Abstract: The results of study of surface morphology and chemical composition of biocompatible titanium oxide and oxynitride coatings deposited by the method of reactive magnetron sputtering are presented in this paper. The distribution of coating’s fragments in size was obtained. Molecular composition of the coatings was obtained by scanning electron microscopy and Raman scattering.