Papers by Keyword: UV-LIGA Process

Abstract: Palmtop tensile and fatigue testing machines were developed in-house for small and thin specimens that were fabricated by the LIGA process. The dimensions of the specimens were selected in accordance with the international standard IEC62047-3, and were 10 micrometers in thickness, 20 micrometers in width, and 500 micrometers in parallel length. Since the loading mechanism and methods of measuring the load and displacement were specially designed, the stiffness of the specimen is quite low compared to that of the conventional large-size specimens. The mechanical properties of electroformed Ni₂Pd₈ and Ni₄Pd₆ alloys were studied with these developed testing machines and excellent values of tensile and fatigue strengths of 2.7 GPa and 1.8 GPa, respectively were obtained in the case of the Ni₄Pd₆ alloy.

Abstract: A micro-coil array is designed and fabricated in this contribution by MEMS (Micro Electro Mechanical Systems) approach. The array’s width is from a dozen microns to several tens of microns. UV-LIGA process is used to fabricate the array by means of sputtering, lithography and electroforming. The sensor array is based on 300μm thick silicon wafer, and is composed of single excitation Cu coils, two serial detection coils. Detection coils are sized from 10μm×10μm, 20μm×15μm to 30μm×15μm respectively, with 10 turns. Successful fabrication of the micro-coil sensor demonstrates the feasibility of UV-LIGA process for miniaturization of micro-coils.

Abstract: Micro hot embossing mold of microfluidic chip used in flow cytometry is designed and microfabricated. After some kinds of microfabrication processes are tried, this paper presents a novel microfabrication technology of micro hot embossing metal mold. Micro metal mold is fabricated by low-cost UV-LIGA surface micro fabrication process using negative thick photoresist, SU-8. Different from other micro hot embossing molds, the micro mold with vertical sidewalls is fabricated by micro nickel electroforming directly on Nickel base. Based on the micro Nickel mold and automation fabrication system, high precision and mass-producing microfluidic chips have been fabricated and they have been used in flow cytometry