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Papers by Keyword: UV/Chlorine

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Controlling Silicon Surface Roughness During Photochemical Cleaning

Authors: Jeffery W. Butterbaugh, Brent Schwab, Thomas Sorsch, Martin L. Green

169

Role of UV/Chlorine Exposure during Dry Surface Conditioning before Integrated Epi Deposition Process

Authors: Jerzy Ruzyllo, Erika Röhr, Matty Caymax, M. Baeyens, Thierry Conard, Paul W. Mertens, Marc Heyns

233