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Articles by keyword: «UV Lithography»

• A Novel Experimental Approach to Compatible Carbon Nanofiber Diffusion around Circular Carbon Micro-Post Surfaces
  Published in: Defects and Diffusion in Ceramics XII (p31)
• A Valveless Micro Impedance Pump Driven by PZT Actuation
  Published in: Progress on Advanced Manufacture for Micro/Nano Technology 2005 (p127)
• Design and Analysis of a MEMS Tunable Inductor Based on UV Lithography of SU-8
  Published in: Material and Manufacturing Technology II (p36)
• Fabrication of SiCN MEMS by UV Lithography of Polysilazane
  Published in: High-Performance Ceramics IV (p1477)
• Nickel Injection Mould Fabrication via Proton Beam Writing and UV Lithography
  Published in: Advances in Precision Engineering (p188)