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Articles by keyword: «Wet Etching»

• (110) Silicon Hard Master Fabrication Using Wet Etching for Multi-Mode Planar Optical Splitter
  Published in: Advanced Nondestructive Evaluation I (p1704)
• A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution
  Published in: Micro-Nano Technology XIII (p151)
• Analysis of Aromatic Volatiles Utilizing a MEMS-Based Gas Chromatography Column
  Published in: Manufacturing Science and Technology (p2642)
• Characterisation of Surface and Near-Surface Regions in High-Purity Cz Si
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p747)
• Chemical Wet Etching of Silicon Wafers from a Mixture of Concentrated Acids
  Published in: Advances in Materials and Processing Technologies II (p1027)
• Direct Mixing Cleaning Method of Aqua Regia on Wafer
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p245)
• Dislocation Revelation in Highly Doped N-Type 4H-SiC by Molten KOH Etching with Na₂O₂ Additive
  Published in: Silicon Carbide and Related Materials 2010 (p290)
• Effect of Wet Etching Parameter on the Diameter and Length of Silicon Nanowires
  Published in: MEMS/NEMS Nano Technology (p584)
• Etching Method of the Fabrication Optical Tapered Fiber and its Formula
  Published in: Innovation in Materials Science and Emerging Technology (p520)
• Fabrication of Micro Via-Hole by Wet Etching of Pyrex Glass
  Published in: Micro and Nano Technology (p303)
• Hydrogen in III-V Compound Semiconductors
  Published in: Hydrogen in Compound Semiconductors (p393)
• Investigation of Simple Process Technology for the Fabrication of Valveless Micropumps
  Published in: NEMS/MEMS Technology and Devices - ICMAT2011 (p211)
• Low-Cost Fabrication Strategies of Microfluidic Device on Glass Substrate
  Published in: MEMS/NEMS Nano Technology (p83)
• Magnetoresistive Switch Effect and Its Application to Magnetic Field Sensors
  Published in: PRICM-5 (p2223)
• Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process
  Published in: Advances in Engineering Plasticity and Its Applications (p445)