Keyword: "Wet Etching"
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(110) Silicon Hard Master Fabrication Using Wet Etching for Multi-Mode Planar Optical Splitter

Authors: Yu Min Jung, Yeong Cheul Kim, Hwa Il Seo

1704

A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution

Authors: Yu Lv, Hong Juan Cui, Pei Tao Dong, Zhi Hua Chen, Xue Zhong Wu

151

Analysis of Aromatic Volatiles Utilizing a MEMS-Based Gas Chromatography Column

Authors: Yu Hao Su, Chia Yen Lee, Ruey Jen Yang

2642

Analysis of Wet Etching Characteristics of a-IGZO Thin Film

Authors: Long Long Chen, Xi Feng Li, Ji Feng Shi, Hao Zhang, Chun Ya Li, Jian Hua Zhang

2339

Characterisation of Surface and Near-Surface Regions in High-Purity Cz Si

Authors: Antonio Castaldini, Daniela Cavalcoli, Anna Cavallini, T. Minarelli, E. Susi

747

Chemical Wet Etching of Silicon Wafers from a Mixture of Concentrated Acids

Authors: M.R. Ismail, Wan Jeffrey Basirun

1027

Direct Mixing Cleaning Method of Aqua Regia on Wafer

Authors: Hajime Ugajin, Hayato Iwamoto, Kei Kinoshita

245

Dislocation Revelation in Highly Doped N-Type 4H-SiC by Molten KOH Etching with Na2O2 Additive

Authors: Yong Zhao Yao, Yukari Ishikawa, Yoshihiro Sugawara, Hiroaki Saitoh, Katsunori Danno, Hiroshi Suzuki, Yoichiro Kawai, Noriyoshi Shibata

290

Dislocations in Gan Grown on Silicon

Authors: Qiu Yan Hao, Xin Jian Xie, Cai Chi Liu, Li Wei Zhao

51

Effect of Wet Etching Parameter on the Diameter and Length of Silicon Nanowires

Authors: Yang He, Cheng Yu Jiang, Heng Xu Yin, Chen Jun, Wei Zheng Yuan

584

Showing 1 to 10 of 33 Papers
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