Papers by Keyword: White Light Interferometer

Abstract: In this study, mechanical model of plowing process considering material flow process was built. Dynamic material model of workpiece (AISI D2) was included in this plowing model. The friction between diamond indenter against AISI D2 steel was obtained by the ball-on-plate test. The scratch tests with diamond indenter against AISI D2 steel were performed. The scratch morphology was investigated by white light interferometer. The scratch forces in the different loads were calculated by the mechanical model of plowing process. The calculated scratch forces showed good agreement with experimental results.

Abstract: White light interferometer was employed to measure the surface topography of 60# and 120# alumina grinding wheel. The correlation of wheel topography and its performance was characterized through the three-dimensional (3D) surface characterization parameters of “Birmingham set”. Birmingham parameters were used to characterize the performances of grinding wheel, in items of grain density, grain shape and grain sharpness. The effects of sampling interval on the 3D surface parameters were analyzed and the optimal sampling interval was selected to calculate the 3D surface parameters.

Abstract: In this study, orthogonal arrays were applied in the design of the experiments and Ti6Al4V end-milling experiments were performed on the DAEWOO machining center. The white light interferometer was used to obtain the average surface roughness (Ra). A quadratic model was proposed to fit the experimental data of the surface roughness. And the fit model was used to optimize the cutting parameters in the given material removal rate. Finally the verification experiments showed good agreement with the estimated results.

Abstract: Surface roughness is an important item to evaluate the surface quality. Many researches focused on the optimization of cutting parameters in the specified cooling/lubrication conditions. But the effect of different cooling/lubrication conditions was still less considered. Aimed at this problem, the effect of cutting parameters on the average surface roughness (Ra) in the different cooling/lubrication conditions, including MQL, wet, dry cutting, was analyzed in this study. Orthogonal arrays were applied in the design of the experiments and Ti6Al4V end-milling experiments were performed on the DAEWOO machining center. The white light interferometer was used to obtain the 3D profile of machined surface and calculate the Ra values. The regression analysis and statistical analysis of variance were employed in the process of the experimental data. The relationships between Ra and cutting parameters in the different cooling/lubrication conditions were obtained and the optimum values of the cutting parameters in the range of the experiments were selected.

Abstract: In the semiconductor industry, a device that can measure the surface-profile of photoresist is needed. Since the photoresist surface is very smooth and deformable, the device is required to measure vertical direction with nanometer resolution and not to damage it at the measurement. We developed the apparatus using multi-cantilever and white light interferometer to measure the surface-profile of thin film. But, this system with scanning method suffers from the presence of moving stage and systematic sensor errors. So, in this paper, an error separation approach used coupled distance sensors, together with an autocollimator as an additional angle measuring device, was consulted the potentiality for self-calibration of multi-cantilever. Then, according to this method, we constructed the experimental apparatus and do the measurement on the resist film. The results demonstrated the feasibility that the constructed multi-ball-cantilever AFM system combined with an autocollimator could measure the thin film with high accuracy.

Abstract: This work deals with the development of a full-field extensometric method at a micrometric scale in order to precisely identify the local features of a metallic alloy at the scale of the grains. The full-field method that has been chosen is the grid method that applies a spatial phase-shifting algorithm to a periodic pattern. To mark the sample, direct interferometric photolithography was used. The paper presents the basic features of the technique and first mechanical test results are commented.