Papers by Keyword: XY Stages

Abstract: To develop a high precision Micro Coordinate Measuring Machine (Micro-CMM), it is important to evaluate an X-Y stage on the Micro-CMM. A precision multi-probe measurement system has been designed and developed for simultaneously measuring the yaw and straightness errors of the X-Y stage. In the system, an autocollimator measures the yaw error of the stage, and two laser interferometers measure the profile of a standard mirror which is fixed on the X-Y stage. The straightness error is reconstructed by the application of simultaneous equation and least-squares methods, and the uncertainty associated with the multi-probe method is simulated. When the interval of the laser interferometers equals 10 mm, the standard deviation of multi-probe method using the high accuracy autocollimator and the laser interferometers is about 10 nm. The simulation results satisfy our purpose for the uncertainty of 50 nm, and practical considerations are discussed.

Abstract: Reducing residual vibration is very crucial to enhance the speed and precision of XY stages which are often employed by manufacturing/measuring machines. Input shaping is known to be a very effective tool for suppressing such residual vibration without introducing any complicated sensors and feedback control. This paper investigated the effects of input command discretization parameters in real-time input shaping, such as discretizing interval and duration time, on the dynamic performance of a XY stage equipped with servo motors. A simulation model is established to investigate the dynamic performance of the XY stage. In order to evaluate the real-time input shaping parameters on the performance of the XY stage, two fundamental input shaping schemes, ZV(zero vibration) and ZVD(zero vibration and derivative), are implemented and tested with the discretizing interval and duration time varied. The experimental results provide a strategy to gain better performance.