You wanted to download
Neutralization of Ion Beams for Reduction of Charging Damage in Plasma Etching
There are three ways to get it:
-
Subscription for unlimited downloads of all papers and abstracts on www.scientific.net (US$ 58,- / € 42,- per month)
-
Single paper «Neutralization of Ion Beams for Reduction of Charging Damage in Plasma Etching» only (US$ 28,- / € 20,-)
-
Librarians: Are you interested in IP Access, please use this form