You wanted to download
Etching of Silicon Dioxide with Gas Phase HF and Water: Initiation, Bulk Etching, and Termination.
There are three ways to get it:
-
Subscription for unlimited downloads of all papers and abstracts on www.scientific.net (US$ 98,- / € 74,- per month)
-
Single paper «Etching of Silicon Dioxide with Gas Phase HF and Water: Initiation, Bulk Etching, and Termination.» only (US$ 28,- / € 21,-)
-
Librarians: Are you interested in IP Access, please use this form