Materials Science & Technology

FULLTEXT SEARCH
NEW: Advanced Search
You wanted to download

Effect of Chemical Oxides Formed During Pre-Gate Oxide Cleaning on the Properties of Sub 20Ǻ Thick Ultra-Thin Stack Gate Dielectrics

There are three ways to get it:
  • Subscription for unlimited downloads of all papers and abstracts on www.scientific.net (US$ 98,- / € 71,- per month)

  • Single paper «Effect of Chemical Oxides Formed During Pre-Gate Oxide Cleaning on the Properties of Sub 20Ǻ Thick Ultra-Thin Stack Gate Dielectrics» only (US$ 28,- / € 20,-)

  • Librarians: Are you interested in IP Access, please use this form


If you already have a Personal Account you can login here:






  Forgot password?