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• Subscription for unlimited downloads of all papers and abstracts on www.scientific.net (US$ 58,- / € 42,- per month)
  
  
• Single paper «Effect of an Organic Inhibitor in High pH Chemical Rinse on the Platen for Cu-CMP» only (US$ 28,- / € 20,-)
  
  
• Librarians: Are you interested in IP Access, please use this form
  
  

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