Manufacturing Process Flow Reasoning of Micro Device Based on Ontology
Based on feature modeling technology, a method of manufacturing process flow reasoning of micro device is presented to support the top-down design flow. The knowledge of micro device is hierarchically organized to construct the ontology-based knowledge database that is combined with the expert system by an interface. With the support of process databases, the manufacturing process flow is derived by process reasoning.
Kai Cheng, Yingxue Yao and Liang Zhou
Z. Liu et al., "Manufacturing Process Flow Reasoning of Micro Device Based on Ontology", Applied Mechanics and Materials, Vols. 10-12, pp. 248-252, 2008