Manufacturing Process Flow Reasoning of Micro Device Based on Ontology


Article Preview

Based on feature modeling technology, a method of manufacturing process flow reasoning of micro device is presented to support the top-down design flow. The knowledge of micro device is hierarchically organized to construct the ontology-based knowledge database that is combined with the expert system by an interface. With the support of process databases, the manufacturing process flow is derived by process reasoning.



Edited by:

Kai Cheng, Yingxue Yao and Liang Zhou




Z. Liu et al., "Manufacturing Process Flow Reasoning of Micro Device Based on Ontology", Applied Mechanics and Materials, Vols. 10-12, pp. 248-252, 2008

Online since:

December 2007




[1] Michael S. McCorquodale, Fadi H. Gebara, Keith L. Kraver and et al: Proceedings of the Design, Automation and Test in Europe Conference and Exhibition. IEEE Computer Society , Los Alamitos, CA, USA. Vol. 1 (2003), pp.292-296.

[2] Feng Gao, Y Steve Hong and Radha Sarma: Proceedings of ASME Design Engineering Technical Conferences, Chicago, USA (2003).

[3] Venkataraman Ananthakrishnan, Radha Sarma and G K Ananthasuresh: Journal of micromechanics and microengineering, Vol. 13 (2003), p.927-941.


[4] R Schiek and R Schmidt: Microsystem technologies, Vol. 12 (2006), pp.204-207.

[5] Y.Y. Wang, G.Y. Wu, Y.L. Hao and et al: Acta Electronica Sinica, Vol. 30 (2002), pp.1577-1584.