Design of Displacement Measuring System for Nano-Hardness Test Device


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Nano-hardness test device has the ability to make the load-displacement measurement with sub-nanometer indentation depth sensitivity, and the nanohardness of the material can be got from the load-displacement curve by Oliver-Pharr method. In order to measure the small displacement accurately, we designed a capacitive displacement measuring system. This capacitance micrometer has a resolution of 0.1nm, and is suitable for our nano-hardness test device.



Edited by:

Kai Cheng, Yingxue Yao and Liang Zhou




Q. Liu et al., "Design of Displacement Measuring System for Nano-Hardness Test Device", Applied Mechanics and Materials, Vols. 10-12, pp. 518-521, 2008

Online since:

December 2007




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