Design of Displacement Measuring System for Nano-Hardness Test Device
Nano-hardness test device has the ability to make the load-displacement measurement with sub-nanometer indentation depth sensitivity, and the nanohardness of the material can be got from the load-displacement curve by Oliver-Pharr method. In order to measure the small displacement accurately, we designed a capacitive displacement measuring system. This capacitance micrometer has a resolution of 0.1nm, and is suitable for our nano-hardness test device.
Kai Cheng, Yingxue Yao and Liang Zhou
Q. Liu et al., "Design of Displacement Measuring System for Nano-Hardness Test Device", Applied Mechanics and Materials, Vols. 10-12, pp. 518-521, 2008