Research on Open-Loop Control of a Microactuator with High-Resolution and Large-Stroke Based on Inverse Preisach Model
The hysteresis in piezoelectric actuator is the main factor that affects its displacement accuracy, the hysteresis model is set up by using the theory of preisach, and the research on open-loop control of piezoelectric actuator is carried out based on inverse preisach model. The result shows that the model can describe successfully the hysteresis in piezoelectric actuator, predict the displacement after a series of random voltage path perfectly, and improve the hysteresis of displacement effectively, decrease the nonlinear error of system, increase control precision. A new microactuator with high-resolution and large-stroke based on piezoelectric is presented, and the open-loop control is investigated based on inverse preisach model, its stroke is 300mm, the position accuracy is about 0.03μm, the displacement resolution is up to 0.02μm.
Kai Cheng, Yingxue Yao and Liang Zhou
W.R. Jiang and Z. S. Lu, "Research on Open-Loop Control of a Microactuator with High-Resolution and Large-Stroke Based on Inverse Preisach Model", Applied Mechanics and Materials, Vols. 10-12, pp. 652-656, 2008