A Zero TCF SAW Contact Stress Sensor in ZnO/SiO2/Si Structure

Abstract:

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A thin sensor based on surface acoustic wave resonator (SAWR) in ZnO/SiO2/Si structure for wireless contact stress measurement in thin gap is numerically analyzed. Firstly, the scheme of the SAWR stress sensor and surface effective permittivity for analyzing surface acoustic wave (SAW) in ZnO/SiO2/Si structure are introduced. Then, the phase velocity and electromechanical coupling coefficient of ZnO(1µm)/SiO2(1.4µm)/Si structure for the fundamental and first Rayleigh mode are obtained. For both Rayleigh modes, the temperature coefficient of frequency (TCF) for the structure at different frequency is calculated. Good temperature stability for the structure is achieved at frequency 1GHz for the first Rayleigh mode with averaged TCF about 0.04ppm/°C and stress sensitivity about 22ppm/MPa.

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Periodical:

Edited by:

Paul P. Lin and Chunliang Zhang

Pages:

1894-1898

DOI:

10.4028/www.scientific.net/AMM.105-107.1894

Citation:

J. X. Ding et al., "A Zero TCF SAW Contact Stress Sensor in ZnO/SiO2/Si Structure", Applied Mechanics and Materials, Vols. 105-107, pp. 1894-1898, 2012

Online since:

September 2011

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$35.00

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