Optimization of Non-Uniform Optical Waveguide in MOEMS Accelerometer


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Miniaturization is the rule of the day. This has even extended to optical domain where entire sensor arrays complete with laser or led source and pin photodiode are fabricated within a single chip. The device discussed and analyzed in this paper is a MOEMS accelerometer which consists of uniform micro cantilever on one arm of MZI structure. The refractive index is assumed to vary even along the direction of pulse propagation along with the frequently analyzed refractive index profile perpendicular to the light pulse path. The efficiency of device is increased by numerous optimization measures. A dual approach of optimal curved waveguide with increased difference is found to maximize power in waveguide core with minimal leakage to the cladding. This effectively translates to increased sensitivity as greater power is available for accurate detection process. The analysis is supported by appropriate simulations.



Edited by:

Wu Fan






G. Shanbag et al., "Optimization of Non-Uniform Optical Waveguide in MOEMS Accelerometer", Applied Mechanics and Materials, Vols. 110-116, pp. 2631-2638, 2012

Online since:

October 2011




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