Design and Simulation of MEMS Based Tuning Fork Micro-Gyroscope
In this paper, design, analysis and simulation of microelectromechanical system (MEMS) based inertial sensor type of tuning fork micro gyroscope have been presented. CoventorWare has been used for design and simulation. The proposed design has improved the performances and structure for small vibration amplitude to minimize the mechanical crosstalk. Simulation results show that the capacitance in sense mode, which is detected by variable-gap capacitors, is equal to 2.68 pF in each side of sense mode. Oscillations in drive and sense electrodes with 1-DOF and proof mass with 2-DOF ensure that the proposed model has no common mode that causes mechanical crosstalk.
S. Khankhua et al., "Design and Simulation of MEMS Based Tuning Fork Micro-Gyroscope", Applied Mechanics and Materials, Vols. 110-116, pp. 5036-5043, 2012