Analysis on the Detection Capacitance of Comb Micro-Machined Gyroscope
The micro-machined gyroscope is a kind of typical micro-electro-mechanical sensor, its typical working mode is electrostatic drive and comb capacitive detection. As for as the transverse detection capacitance structure now commonly used, we find out that the relationship between capacitance variation and displacement is nonlinear through analyzing its detection capacitance. This nonlinearity will greatly affect the dynamic performance of micro-machined gyroscope.
Dongye Sun, Wen-Pei Sung and Ran Chen
H. P. Liu et al., "Analysis on the Detection Capacitance of Comb Micro-Machined Gyroscope", Applied Mechanics and Materials, Vols. 121-126, pp. 33-37, 2012