Characterization Model for IC Reference Material

Abstract:

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Not all of the measurement data of IC (Integrated Circuit) reference material are valid, so some work would be do to eliminate the null and wrong ones. This paper presents an algorithmic model of the characterization for IC reference material, which can help choose the valid data for the property value validated of IC reference material. The experimentation results of the characterization procedure are detailed in the paper, which proves to be helpful steps to IC reference material characterization and preparation.

Info:

Periodical:

Edited by:

Dongye Sun, Wen-Pei Sung and Ran Chen

Pages:

735-739

DOI:

10.4028/www.scientific.net/AMM.121-126.735

Citation:

T. Zhang and J. Shi, "Characterization Model for IC Reference Material", Applied Mechanics and Materials, Vols. 121-126, pp. 735-739, 2012

Online since:

October 2011

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Price:

$35.00

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