Realization of Two-Axis Macro-Micro Dual-Driven System
Macro-micro dual-driven technique is an effective method to realize motion control of long-stroke and high-precision. The basic line is that micro feed stage compensates the error of macro feed stage measured by displacement sensor in order to decrease system error and improve positioning precision. This paper sets up two-axis macro-micro dual-driven system consisting of planar axis motor and piezoelectric ceramics actuator. The planar axis motor realizes coarse feed and piezoelectric ceramics compensates motion error. Flexure hinge is adopted as micro transmission mechanism to avoid noize, friction and gap. By adopting Digital Signal Processor as the controller, the compensation can be seen as synchronous. The experimental result shows the error of this system is under 200nm.
F. Fei et al., "Realization of Two-Axis Macro-Micro Dual-Driven System", Applied Mechanics and Materials, Vols. 130-134, pp. 1200-1204, 2012