Liquid-Phase Diffusion of Phosphorus Atoms in Laser-Doped Crystalline Silicon Solar Cells
In this paper, a nonlinear numerical model of laser melting of crystalline silicon solar cells and phosphorus diffusion has been established by finite difference method implemented in MATLAB. Based on the features of liquid-phase diffusion of phosphorus atoms in melting silicon, theoretical simulation for phosphorus concentration profiles and explanation for the mechanism of laser doping are achieved. The theoretical phosphorus concentration profile is in good agreement with the experimental SIMS data.
T. Li et al., "Liquid-Phase Diffusion of Phosphorus Atoms in Laser-Doped Crystalline Silicon Solar Cells", Applied Mechanics and Materials, Vols. 130-134, pp. 3316-3319, 2012