Research on Vibration and Shock-Proof Technology of Silicon Micro-Machined Gyroscope
A silicon micro-machined gyroscope without the driven conformation is introduced. The structure of the silicon micro-machined gyroscope are researched and designed to withstand vibration and shock at the request of the rotation carrier. The different methods including changing the epoxy resin and sealing shell with laser are carried out and proofed by experiment verification.
F. X. Zhang et al., "Research on Vibration and Shock-Proof Technology of Silicon Micro-Machined Gyroscope", Applied Mechanics and Materials, Vols. 20-23, pp. 34-39, 2010