Study on Precision Scanning Measurement Based on Acousto-Optic Deflection Technology
Scanning measurement is a basic means to achieve high precision geometric measurement. However, the scanning device has a congenital defect which is the presence of a mechanical scanning device, thus, it has some issues such as wear, vibration, temperature sensitive.This articlecreatively put forward a kind of control method which is using acousto-optic deflection technology to realize the laser scanningfrom the general character of scanning measurement.The method has the advantages of the principle, it eliminatestheinherent defect of rotary machine structure on the measurement accuracy, speed, controllability, and stability. The exploration and research of this method will provides a new non inertial rotation scanning means for optical scanning measurement. More important, the implementation of the method will provides a new thought and method for the kind of problem about beam scanning measurement of geometric measurement.
X. H. Ding et al., "Study on Precision Scanning Measurement Based on Acousto-Optic Deflection Technology", Applied Mechanics and Materials, Vols. 229-231, pp. 1398-1401, 2012